Integrated Bioscience and Nanotechnology Cleanroom
University of Georgia
Contact: Kun Yao
The Integrated Bioscience and Nanotechnology Cleanroom (iBioNC)at University of Georgia includes a 2,200-square-foot (Phase I) Class 100/1,000 multidisciplinary, nanotechnology-focused fabrication, characterization, and manipulation facility and a 1,000-square-foot (Phase II) Class 10,000 biocleanroom part. This campus-wide shared facility can also be accessed by users outside UGA.
A list of equipment:
Lithography / Patterning Tools:
- Karl Suss MA6 Mask Aligner
- Karl Suss MJB 3 Mask Aligner
- Laser MicroMachining System
- Optical Microscope
- Spin Coater
- Hot Plate
Deposition Tools:
- Atomic Layer Deposition System
- Ink-Jet Deposition System
- PVD 75 Electron Beam Deposition System
- PVD 75 Sputtering Deposition System
- Thermal Evaporator
Etching Tools:
- Trion Phantom III RIE Etcher
- Trion Sirus T2 TableTop RIE Etcher
- Metrology Tools:
- Malvern Morphologi 4
- M-2000V Spectroscopic Ellipsometer
- Microscope System with Fast CCD Camera
- PHE101 Discrete Wavelength Ellipsometer
- Profilometer
- XGT-5000 X-ray Analytical Microscope
- Zetasizer Nano ZS Analyzer
- Carl Zeiss Axio Scope.A1 Microscopy Systems
- Model EZ7 Vibrating Sample Magnetometer (VSM)
Biology Tools:
- Bio-Hood
- CO2 Incubator
- Incubator Shaker
- Low temperature Refrigerator
- Other Processing tools:
- Plasma Cleaner
- Wire Bonder
More about this core facility at University of Georgia »
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