Integrated Bioscience and Nanotechnology Cleanroom
University of Georgia

Contact: Kun Yao

The Integrated Bioscience and Nanotechnology Cleanroom (iBioNC)at University of Georgia includes a 2,200-square-foot (Phase I) Class 100/1,000 multidisciplinary, nanotechnology-focused fabrication, characterization, and manipulation facility and a 1,000-square-foot (Phase II) Class 10,000 biocleanroom part. This campus-wide shared facility can also be accessed by users outside UGA.

A list of equipment:

Lithography / Patterning Tools:

  • Karl Suss MA6 Mask Aligner
  • Karl Suss MJB 3 Mask Aligner
  • Laser MicroMachining System
  • Optical Microscope
  • Spin Coater
  • Hot Plate

Deposition Tools:

  • Atomic Layer Deposition System
  • Ink-Jet Deposition System
  • PVD 75 Electron Beam Deposition System
  • PVD 75 Sputtering Deposition System
  • Thermal Evaporator

Etching Tools:

  • Trion Phantom III RIE Etcher
  • Trion Sirus T2 TableTop RIE Etcher
  • Metrology Tools:
  • Malvern Morphologi 4
  • M-2000V Spectroscopic Ellipsometer
  • Microscope System with Fast CCD Camera
  • PHE101 Discrete Wavelength Ellipsometer
  • Profilometer
  • XGT-5000 X-ray Analytical Microscope
  • Zetasizer Nano ZS Analyzer
  • Carl Zeiss Axio Scope.A1 Microscopy Systems
  • Model EZ7 Vibrating Sample Magnetometer (VSM)

Biology Tools:

  • Bio-Hood
  • CO2 Incubator
  • Incubator Shaker
  • Low temperature Refrigerator
  • Other Processing tools:
  • Plasma Cleaner
  • Wire Bonder

More about this core facility at University of Georgia »

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